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the sufficient imaging resolutions (sub-20 nm) measurements become slow, and because dose accumulates with every repeated measurement, radiation damage sets a hard limit on how long a process can be
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the sufficient imaging resolutions (sub-20 nm) measurements become slow, and because dose accumulates with every repeated measurement, radiation damage sets a hard limit on how long a process can be
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. This allows us to shift from the standard imaging question of "what is the structure of this sample?" to "how does the structure differ from the known design?". The second question can be answered with far
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