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of nanoscale features on chips, ensuring that critical dimensions and overlay accuracy meet the tolerances required for functional devices. As transistor geometries continue to shrink, the performance of optical
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learning pipelines for multilayer segmentation and nanoscale transistor classification from microscopy images; (b) Designing graph-based inference models capable of reconstructing higher-level logical blocks
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) Developing deep learning pipelines for multilayer segmentation and nanoscale transistor classification from microscopy images; (b) Designing graph-based inference models capable of reconstructing higher-level
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