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machine learning and physics to recover nanoscale information from imperfect images? Modern computer chips are built with features only a few nanometers across, yet manufacturers need to measure these
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features on chips. The required 13.5-nm radiation is generated from plasma that is produced from tiny tin droplets that are heated by powerful laser pulses. At ARCNL, we are now thinking about light sources
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enables patterning the smallest, smartest, and most energy-efficient features on chips. The required 13.5-nm radiation is generated from plasma that is produced from tiny tin droplets that are heated by
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