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semiconductor devices such as field programmable gate arrays, advanced synchronous dynamic random-access memories, microprocessors and system-on-chip devices. The research will focus on the development of
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materials, devices and systems using nano- and microfabrication techniques. One ambition of the IDS group is to combine its experience in both semiconductor and MEMS technologies to design, fabricate and
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stacked and interconnected to create faster, more compact and more energy-efficient semiconductor devices. However, the detailed mechanisms that determine bonding quality are still not sufficiently
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stacked and interconnected to create faster, more compact and more energy-efficient semiconductor devices. However, the detailed mechanisms that determine bonding quality are still not sufficiently