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Nondestructive defect detection metrology for semiconductor manufacturing

NIST | Gaithersburg, Maryland | United States | about 9 hours ago

, 48, 102372 [2] F.H. Kim , A.L. Pintar, J.H.J. Scott, E.J. Garboczi (2023), “Evaluation of Flaw Detection Algorithm Using Simulated X-Ray Computed Tomography of Ground Truth Data”, ASME J