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. The need for such a technology comes from the the extreme miniaturisation of micro-electronics, which places extreme demands not just on nanofabrication, but also on inspection methods that visualize
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a scanning electron microscope (SEM) to excite nanomaterials. The oscillating electric field carried by the electron serves as a broadband (0-30 eV) excitation source with 5 nm spatial and 5 fs
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