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that radiate at even shorter wavelengths below 13.5 nm, which could open up a host of applications in future nanolithography, metrology, as well as biological imaging. There are many open questions: what
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powerful laser pulses. At ARCNL, we are now thinking about light sources that radiate at even shorter wavelengths below 13.5 nm, which could open up a host of applications in future nanolithography
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