PhD position on chemical and physical processes during EUV exposure

Updated: about 14 hours ago
Deadline: 31 Mar 2023

  • Vacancies
  • PhD position on chemical and physical processes during EUV exposure

  • Key takeaways

    Are you interested in research on free-standing thin films of only few tens of nanometer thickness involving EUV experiments at a synchrotron?

    Ultra-thin, transparent free-standing membranes are used as protective windows (‘pellicles’) in EUV photolithography, to protect EUV masks from contamination. The membranes need to resist not only thermo-mechanical stresses, but also surface degradation by EUV photon induced chemical reactions, bombardment by low energetic ions, and chemical etching by radicals. We are looking for a motivated and skilled researcher to investigate physical and chemical modifications of ultra-thin membranes. The aim of the project is to develop fundamental knowledge on the EUV-induced degradation mechanisms of thin films and find materials and processes to mitigate pellicle damage.

    The project will be carried in the Industrial Focus Group XUV Optics where you will join a motivated team of researchers in the field of EUV optical devices. The group is at the forefront of fundamental research, relevant to high-tech, industrial focused applications ( The research will be carried out in a state-of-the-art thin film laboratory within the MESA+ Institute for Nanotechnology at the University of Twente, in collaboration with the PTB Laboratory in Berlin.

    As a PhD researcher, your tasks will be to design and execute experiments in the context of EUV induced material damage mechanisms. You will make use of state-of-the art surface coating and analysis techniques (XPS, LEIS, XRD) at the University of Twente and occasionally synchrotron facilities at PTB for EUV degradation experiments. The insights will be used to build analytical models from fundamental principles. An understanding of theoretical concepts in addition to detailed understanding of metrology is therefore, beneficial. In this manner, your contributions will lead to possible new understanding in the field.

    Information and application

    Your reaction should include an application/motivation letter, emphasizing your specific interest and motivation, a detailed CV, a list of publications, contact details of referees, and an academic transcript of B.Sc. and M.Sc. education. An interview and a scientific presentation will be part of the selection procedure. For more information about the position, you are encouraged to contact Wesley van den Beld at

    Please appy via the button below.

    About the department

    The University of Twente stands for life sciences and technology. High tech and human touch. Education and research that matter. New technology which leads change, innovation and progress in society. The University of Twente is the only campus university in the Netherlands. We have a strong focus on personal development and give scope for carrying out pioneering research. The Faculty of Science & Technology works together intensively with industrial partners and researchers in the Netherlands and abroad and conducts extensive research for external commissioning parties and funders.

    The XUV Optics group is embedded in the MESA+ Institute (, which is one of the largest nanotechnology research institutes in the world, delivering competitive and successful high-quality research. The institute employs 500 people of which 275 are PhD’s or PostDocs. With its unique NanoLab facilities the institute holds 1250 m2 of cleanroom space and state-of-the-art research equipment.

    The University of Twente is an equal opportunity employer which values diversity. We do not discriminate on race, religion, color, national origin, gender, sexual orientation, age, marital status, or disability status. Because of our diversity values we do particularly support women to apply.

    About the organisation

    The Faculty of Science & Technology (Technische Natuurwetenschappen, TNW) engages some 700 staff members and 2000 students in education and research on the cutting edge of chemical technology, applied physics and biomedical technology. Our fields of application include sustainable energy, process technology and materials science, nanotechnology and technical medicine. As part of a people-first tech university that aims to shape society, individuals and connections, our faculty works together intensively with industrial partners and researchers in the Netherlands and abroad, and conducts extensive research for external commissioning parties and funders. Our research has a high profile both in the Netherlands and internationally and is strengthened by the many young researchers working on innovative projects with as doctoral candidates and post-docs. It has been accommodated in three multidisciplinary UT research institutes: Mesa+ Institute, TechMed Centre and Digital Society Institute.

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