PhD: Molecular-scale model of pattern formation in EUV-lithography photoresists

Updated: about 1 hour ago
Deadline: 31 Oct 2020


Department of Applied Physics

Reference number


Job description

The most recent milestone in the roadmap of the semiconductor industry has been the introduction of Extreme Ultraviolet (EUV) lithography. Achieving its ultimate resolution requires nanometer-scale understanding and control of the processes that are induced by EUV light in the photoresists used.

The pattern formation process starts with illumination through a mask of a thin photoresist layer, consisting of a sensitive polymer or of small metal-organic molecules. EUV light absorption creates a cascade of primary, secondary (etc.) electrons and holes, which induce chemical changes of the photoresist. After this conversion process, a pattern of connected regions will form in the photoresist that remains after a development step.

The project

The project aims at developing a kinetic Monte Carlo simulation method that truly describes the molecular-scale excitation processes in the organic photoresist material that occur upon EUV illumination. The simulation tool will enable carrying out virtual EUV photolithography experiments. The project focusses on the modeling of the physics of the cascade formation process, which leads to a cloud of diffusing charge carriers, and on using the model to study the ultimate resolution limits. 

You will carry out the work under the supervision of Prof. dr. Reinder Coehoorn and Prof. dr. Peter Bobbert in the group research group Molecular Materials and Nanosystems (M2N, ) at the Applied Physics Department of the Eindhoven University of Technology. The group has a vast experience on the development of predictive Monte Carlo simulations. A simulation tool for Organic Light-Emitting Diodes is now used worldwide by large industries and universities.  You will develop the simulation software in close collaboration with the company Simbeyond ( ), a spin-off of our group that commercializes the OLED simulation tool and a partner in this project. The EUV model should be applicable to any photoresist material, and will be validated by making a comparison with experimental results that are obtained from various collaboration partners in world-leading research institutes, including ARCNL (Advanced Research Center on Nano Lithography, Amsterdam, co-founded by the company ASML which is world-leader in EUV lithography), IMEC (Leuven, Belgium), companies and other universities.

Job requirements
  • A master’s degree (or an equivalent university degree) in Applied Physics.
  • A research oriented attitude.
  • Ability to work in a team.
  • Fluent in spoken and written English.

Conditions of employment
  • A meaningful job in a dynamic and ambitious university with the possibility to present your work at international conferences.
  • A full-time employment for four years, with an intermediate evaluation after one year.
  • To support you during your PhD and to prepare you for the rest of your career, you will have free access to a personal development program for PhD students (PROOF program ).
  • A gross monthly salary between € 2.395,- and € 3.061,-(on a fulltime basis), depending on experience and knowledge. The salary is in accordance with the Collective Labor Agreement of the Dutch Universities.
  • Benefits in accordance with the Collective Labor Agreement for Dutch Universities.
  • Additionally, an annual holiday allowance of 8% of the yearly salary, plus a year-end allowance of 8.3% of the annual salary.
  • A broad package of fringe benefits, including an excellent technical infrastructure, moving expenses, and savings schemes.
  • Family-friendly initiatives are in place, such as an international spouse program, and excellent on-campus children day care and sports facilities.

Information and application

Do you recognize yourself in this profile and would you like to know more? Please contact Prof. dr. Reinder Coehoor: r.coehoorn[at] .

For information about terms of employment, please contact HR services: hrservices.flux[at]

Please visit to find out more about working at TU/e!


We invite you to submit a complete application by using the 'apply now'-button on this page. The application should include a:

  • Cover letter in which you describe your motivation and qualifications for the position.
  • Curriculum vitae, including a list of your publications and the contact information of three references.
  • Brief description of your MSc thesis.

We look forward to your application and will screen it as soon as we have received it. Screening will continue until the position has been filled.

View or Apply

Similar Positions