Reactive species transport inside nanometric structures
on wet-processed silicon wafers
The company Lam Research develops and manufactures single-wafer wet-processing devices for the
global semiconductor industry. The spin processing tools are designed for a highly controlled deposition of
specific cleaning, etching, and stripping chemicals on the rotating semiconductor wafers. The working liquid
is supplied through a vertical jet moving above the rotating wafer (see Figure 1). The ongoing miniaturization
of the surface structures makes it increasingly difficult to attain the desired quality of the process result.
For mastering this challenge, one needs a reliable comprehensive description of the relevant multi-scale
transport phenomena, ranging from the macro- and microscopic liquid film flow scales on the rotating substrate
down to smallest molecular scales inside the nanometer-size channel structures (vias, see Figure 2)
fabricated by the etching process. The present project shall develop a computational model for predicting
the convective/diffusive transport of reactive species on their way from the liquid film supply at the entrance
down to the bottom of the via, where these agents are supposed to chemically dissolve and remove all
residues from the prior etching. Starting from an already existing model for the macroscopic on-wafer
transport of mass, momentum and heat in the rotating thin film, the numerical modelling shall be extended
to the nanoscopic molecular diffusive transfer mechanisms inside the via, including chemical reactions.
Measured residue amounts from via-bottom reactions are used for model validation.
The project is carried out within the framework of the COMET centre of excellence “Centre for Electrochemistry
and Surface Technology (CEST)” Austria, with the industrial partner Lam Research AG, located at
Villach (Austria). The academic partner, the Institute of Fluid Mechanics and Heat Transfer at Graz University
of Technology, will supervise the candidate based on the scientific content of the project work.
Starting date: Any time from now, at the earliest convenience
Duration: 3 years
Ph D Position: Film Thickness In Grease Lubricated Roller Bearings, University of Twente (UT), Netherlands, 1 day ago
The SKF University Technological Centre for Grease Lubrication at the University of Twente has an opening for a PhD candidate. The goal of this 4-year project is to measure and model film thicknes...
Postdoc Position: Fabrication And Characterization Of Thermal Routers Based On 2 D Heterostructures And Graphite, University of Twente (UT), Netherlands, about 7 hours ago
We envision a candidate that will be using thin-film layer deposition techniques, like Chemical Vapor Deposition, to achieve conformal 2D layers (transitional metal dichacolgenides) on top of grap...
Senior Position Within The Academy Of Film And Creative Technology, Times Higher Education, United Kingdom, 28 days ago
SENIOR POSITIONS WITHIN THE ACADEMY OF FILM AND CREATIVE TECHNOLOGY Title of Position: Professor and Dean, the School of Film and TV Arts Title of Position: Professor and Dean, the School of Cultu...
Ph D On Fabrication And Characterization Of Thermal Routers Based On 2 D Heterostructures And Graphite, University of Twente (UT), Netherlands, 1 day ago
The Catalytic Processes and Materials (CPM) group, from the faculty of Science and Technology (S&T) of the University of Twente, in collaboration with the Thermal Engineering (TE) group, from the ...
Ph D Position: Hts Based High Tech Mechanical Devices, University of Twente (UT), Netherlands, about 8 hours ago
The programs' central ambition is to valorize and to expand the knowledge base that is present at the UT in the fields of modern superconducting materials and of cryogenic technology by integratin...
Researcher Position In The Field Of Oxide Electronics And Memory Devices, Uppsala University, Sweden, about 20 hours ago
Published: 2022-01-17 Uppsala University is a comprehensive research-intensive university with a strong international standing. Our ultimate goal is to conduct education and research of the highe...