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activities of the Source Department aim at an atomic- and molecular-level understanding of the fundamental dynamics in the operation of contemporary and future plasma-based sources of extreme-ultraviolet (EUV
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application. It is part of activities in ARCNL’s Source Department. The research activities of the Source Department aim at an atomic- and molecular-level understanding of the fundamental dynamics in
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limited, noisy, and low-resolution measurement data? In this project, you will develop a novel physics-informed machine learning approach that integrates physical simulations of the measurement process with
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