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machine learning and physics to recover nanoscale information from imperfect images? Modern computer chips are built with features only a few nanometers across, yet manufacturers need to measure these
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that radiate at even shorter wavelengths below 13.5 nm, which could open up a host of applications in future nanolithography, metrology, as well as biological imaging. There are many open questions: what
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, metrology, as well as biological imaging. There are many open questions: what elements should be used to generate the required radiation? how do we generate as many ‘usable’ photons from the plasma as
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