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located at Amsterdam Science Park in the Netherlands and has approximately 100 scientists of which 65 are ambitious (young) researchers from all over the globe and support staff. See also www.arcnl.nl
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features on chips. The required 13.5-nm radiation is generated from plasma that is produced from tiny tin droplets that are heated by powerful laser pulses. At ARCNL, we are now thinking about light sources
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powerful laser pulses. At ARCNL, we are now thinking about light sources that radiate at even shorter wavelengths below 13.5 nm, which could open up a host of applications in future nanolithography
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