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machine learning and physics to recover nanoscale information from imperfect images? Modern computer chips are built with features only a few nanometers across, yet manufacturers need to measure these
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decades of collaborative work between industry and science – a Project Apollo of the digital age. The short, 13.5-nm EUV wavelength enables patterning the smallest, smartest, and most energy-efficient
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The revolutionary introduction of EUV lithography was the culmination of several decades of collaborative work between industry and science – a Project Apollo of the digital age. The short, 13.5-nm EUV wavelength
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