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period of 4 years, starting 1/10/22. The project will be carried out by a multidisciplinary research team with groups from VUB, UHasselt and KU Leuven. The project will also be advised by 10 Flemish
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for n-type and p-type doping respectively. Second, doping using low energy phosphorus implantation will be studied, controlling the implantation depth by means of sacrificial polymer films. As a third
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